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3D anisotropy measurement methodology for surface microstructures
Author(s) -
Filliger R.,
Mermoud O.,
Trivun D.,
Walther P.
Publication year - 2012
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5057
Subject(s) - anisotropy , chord (peer to peer) , microstructure , surface (topology) , materials science , geometry , computational physics , condensed matter physics , physics , optics , mathematics , computer science , composite material , distributed computing
We propose a simple method able to quantify three‐dimensional (3D) anisotropy in topographic microstructure measurements. The anisotropy quantification of 3D surface data is based on a horizontal‐cut analysis yielding level sets. For a specific level set, we study xy anisotropy with the use of a directional chord length analysis. In the height profile direction, the z direction, anisotropy is quantified using the framework of mean Euler characteristic and more generally that of Minkowski functionals. We exemplify the method with the use of 3D heights profiles from atomic force microscopy measurements. Copyright © 2012 John Wiley & Sons, Ltd.