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Signals of secondary ions and resonantly and nonresonantly ionized neutrals sputtered from binary alloys as a function of oxygen exposure
Author(s) -
München J.,
Lipinsky D.,
Arlinghaus H. F.
Publication year - 2013
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.5027
Subject(s) - ion , secondary ion mass spectrometry , chemistry , ionization , sputtering , yield (engineering) , mass spectrometry , alloy , analytical chemistry (journal) , oxygen , atomic physics , polyatomic ion , flux (metallurgy) , materials science , thin film , nanotechnology , metallurgy , physics , organic chemistry , chromatography
For the quantification of elements in different chemical matrices, in‐depth knowledge of the emission processes of atomic and molecular particles under ion bombardment is of great importance. This knowledge can be obtained by analyzing the flux composition of secondary ions and neutrals under ion bombardment. Flux composition, the mutual interaction of alloy components, and the relative sensitivity factors as a function of oxygen exposure and as a function of different redox potentials between alloy components were investigated. GdTi80 (20 at% Gd and 80 at% Ti), GdFe75, TiFe50, and TiCu50 binary alloys were used for the experiments. The data show that the mutual interaction of alloy components during oxygen exposure causes significant changes in the secondary ion and neutral yield. Also, significant differences between the relative sensitivity factors for postionized atoms sputtered from binary alloys as a function of oxygen exposure were observed. Measurements using time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) and resonant and nonresonant laser‐secondary neutral mass spectrometry (laser‐SNMS) show that the fluctuation of the yield ratios can be explained by strong variations in the secondary ion yield and by variations of the molecular and atomic fractions in the flux composition of secondary particles. Copyright © 2012 John Wiley & Sons, Ltd.