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Thickness contrast of few‐layered graphene in SEM
Author(s) -
Park MinHo,
Kim TaeHoon,
Yang CheolWoong
Publication year - 2012
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.4995
Subject(s) - graphene , scanning electron microscope , raman spectroscopy , acceleration voltage , materials science , substrate (aquarium) , electron , electron microscope , acceleration , nanotechnology , analytical chemistry (journal) , optoelectronics , optics , chemistry , composite material , physics , cathode ray , geology , oceanography , classical mechanics , quantum mechanics , chromatography
We observed graphene flakes on a SiO 2 /Si substrate and confirmed the variation in the thickness of the flakes by optical microscopy, Raman spectroscopy and scanning electron microscopy (SEM). We were able to clearly distinguish the thickness variation of the graphene provided a low primary electron acceleration voltage was used. It was found that different contrasts in SEM images at low acceleration voltages could be attributed to the fact that the generation of secondary electrons emitted from the graphene was affected by the different work functions that corresponded to the number of graphene layers. Copyright © 2012 John Wiley & Sons, Ltd.