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Synchrotron investigation of the multilayer nanoperiodical Al 2 O 3 /SiO/Al 2 O 3 /SiO…Si structure formation
Author(s) -
Turishchev S. Yu.,
Terekhov V. A.,
Koyuda D. A.,
Pankov K. N.,
Domashevskaya E. P.,
Ershov A. V.,
Chugrov I. A.,
Mashin A. I.
Publication year - 2012
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.4868
Subject(s) - xanes , synchrotron radiation , synchrotron , silicon , annealing (glass) , spectral line , extended x ray absorption fine structure , silicate , absorption spectroscopy , aluminium , spectroscopy , absorption (acoustics) , analytical chemistry (journal) , materials science , chemistry , optics , physics , optoelectronics , metallurgy , organic chemistry , chromatography , quantum mechanics , astronomy , composite material
The results of a multilayered nanoperiodical structures (MNS; Al 2 O 3 /SiO/Al 2 O 3 /SiO…Si) investigation using X‐ray absorption near‐edge structure (XANES) spectroscopy technique are presented. XANES spectra were obtained using synchrotron radiation. Possible silicon nanocluster formations are shown on the surface layers of the MNS under high‐temperature annealing. At the same time, possible aluminum silicate formation is shown. The phenomenon of absorption spectra intensity inversion is demonstrated in the results of the interaction between synchrotron radiation and MNS. Copyright © 2012 John Wiley & Sons, Ltd.