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Development of laser ionization mass nanoscope (LIMAS)
Author(s) -
Ebata Shingo,
Ishihara Morio,
Uchino Kiichiro,
Itose Satoru,
Matsuya Miyuki,
Kudo Masato,
Bajo Kenichi,
Yurimoto Hisayoshi
Publication year - 2012
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.4857
Subject(s) - mass spectrometry , chemistry , laser , ionization , ion source , ion , analytical chemistry (journal) , femtosecond , ion beam , atomic physics , optics , physics , chromatography , organic chemistry
We have developed a new nano‐beam time‐of‐flight secondary neutral mass spectrometry system: laser ionization mass nanoscope or LIMAS. The primary ion beam column was equipped with a Ga liquid metal ion source and aberration correction optics. The primary ion beam was down to 40 nm in diameter under a current of 100 pA with an energy of 20 keV. The sputtered particles were post‐ionized under non‐resonance mode by a femtosecond laser. The post‐ionized ions were introduced into a multi‐turn mass spectrometer. A mass resolution of up to 40 000 was achieved. The vacuum of the sample chamber was maintained under an ultrahigh vacuum of 2 × 10 −8  Pa. This instrument would be effective for ultrahigh sensitive analysis of nanosized particles such as return samples from asteroids, comets, and planets. Copyright © 2012 John Wiley & Sons, Ltd.

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