Premium
Linearity of the instrumental intensity scale in TOF‐SIMS—a VAMAS interlaboratory study
Author(s) -
Lee J. L. S.,
Gilmore I. S.,
Seah M. P.
Publication year - 2012
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3761
Subject(s) - linearity , ion , detector , dead time , analytical chemistry (journal) , intensity (physics) , materials science , chemistry , optics , statistics , physics , mathematics , electronic engineering , engineering , chromatography , organic chemistry
Abstract A VAMAS interlaboratory study involving 21 time‐of‐flight SIMS instruments from nine countries has been conducted to evaluate the linearity of the instrumental intensity scale and procedures for intensity correction. Analysts were supplied, by National Physical Laboratory (NPL), with a protocol for analysis (closely aligned with ISO 23830) together with a reference material of polytetrafluoroethylene (PTFE) tape. The primary ion beam current is varied to provide secondary ion intensities that span the linear to nonlinear regime. The natural carbon isotope ratios 12 C x F y + / 13 C 12 C x −1 F y + for five peaks are used to evaluate the linearity, without a need to measure the ion beam current. A method is given for determining the linearity as a function of secondary ion intensity, with and without dead time correction. It is found that single ion counting statistics is closely obeyed, and the linearity achievable is generally excellent with careful application of dead time correction. Three quarters of instruments in the study achieved better than 95% linearity at a count rate of 0.8 measured counts per pulse, equivalent to 1.6 secondary ions impinging the detector per primary ion pulse. We discuss factors affecting linearity and the precise application of dead time correction and give guidance for practical analysis. This includes suboptimal detector efficiency, inhomogeneous intensities across the rastered area, inadequate charge compensation, and the choice of peak integration limits. The interlaboratory study shows that the method to determine linearity is generally applicable, robust and provides an excellent basis for the development of an ISO standard. © Crown copyright 2011. Reproduced with the permission of Her Majesty's Stationery Office. Published by John Wiley & Sons, Ltd.