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Functionalized imidazolium wear‐resistant ionic liquid ultrathin films for MEMS/NEMS applications
Author(s) -
Mo Yufei,
Huang Fuchuan,
Zhao Fei
Publication year - 2011
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3684
Subject(s) - materials science , nanoelectromechanical systems , tribology , composite material , thin film , substrate (aquarium) , wafer , wetting , lubricant , nanotechnology , durability , lubrication , adhesion , nanoscopic scale , nanotribology , coating , nanoparticle , nanomedicine , oceanography , geology
As a kind of new material, ionic liquids (ILs) are considered a new type of lubricant for micro/nanoelectromechanical system (M/NEMS) due to their excellent thermal and electrical conductivity. However, so far, only a few reports have investigated the friction and wear of thin films of these materials at the micro scale. Evaluating the nanoscale tribological performance of ILs when applied as films of a few nanometers thickness on a substrate is a critical step for their application in M/NEMS devices. To achieve this purpose, IL thin films with four kinds of anions were synthesized and prepared on single‐crystal silicon wafers by the dip‐coating method. Film thickness was determined by the ellipsometric method. Their surface morphologies were observed by means of atomic force microscopy (AFM). The nano and micro tribological properties of the IL films were investigated by a friction force microscope (FFM)with a spherical probe and a UMT‐2MT tribotester, respectively. The corresponding morphologies of the wear tracks of the IL films were examined using a three‐dimensional non‐contact interferometric microscope. The impact of temperature on the adhesion behavior was studied, as well as the effect of sliding frequency and load on the friction coefficient, load bearing capacity and anti‐wear durability. It was found that friction, adhesion and durability of IL films were strongly dependent on their anionic molecular structures, wettability and ambient environment. Copyright © 2010 John Wiley & Sons, Ltd.