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Ultra‐high performance multi‐turn TOF‐SIMS system with a femto‐second laser for post‐ionization: investigation of the performance in linear mode
Author(s) -
Ishihara Morio,
Ebata Shingo,
Kumondai Kousuke,
Mibuka Ryo,
Uchino Kiichiro,
Yurimoto Hisayoshi
Publication year - 2010
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3611
Subject(s) - laser , femtosecond , chemistry , ionization , mass spectrometry , signal (programming language) , analytical chemistry (journal) , ion , optics , atomic physics , physics , organic chemistry , chromatography , computer science , programming language
The performance of a newly developed TOF‐SIMS System with a femtosecond laser postionization and a multiturn mass spectrometer was investigated in linear mode. This system would be very effective for analyzing valuable material such as space samples. By using postionization the secondary ion signals of Ag were increased (up to 100 times), compared with the conventional TOF‐SIMS experiments. The laser power dependence on the signal intensities was also investigated and it was confirmed that the signal intensities reached specific values above the specific laser power. Lateral resolution of the elemental map was calculated to be about 40 nm. Copyright © 2010 John Wiley & Sons, Ltd.