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Novel anodic aluminum oxide‐based nanofabrication: applications in physics and biology
Author(s) -
Moyen E.,
Sahaf H.,
Macé M.,
Masson L.,
Sengupta K.,
Hanbücken M.
Publication year - 2010
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3575
Subject(s) - nanopillar , anodic aluminum oxide , nanolithography , membrane , fabrication , nanotechnology , evaporation , oxide , materials science , etching (microfabrication) , aluminium , aluminum oxide , polymer , anode , nanostructure , physics , chemistry , metallurgy , composite material , electrode , medicine , biochemistry , alternative medicine , pathology , layer (electronics) , thermodynamics
Porous anodic aluminum oxide (AAO) membranes with varying but controlled morphology are used in several complementary experiments in physics and biology. The present paper gives a description of the membrane fabrication procedure and presents a selection of applications based on the use of the membranes when used as evaporation masks in growth experiments, as masks in reactive ion etching experiments or as molds to fabricate arrays of ordered polymer nanopillars. Copyright © 2010 John Wiley & Sons, Ltd.