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Elaboration and quantitative investigation of BCN‐type films by dynamic SIMS using the MCs x + mode
Author(s) -
Wu Fang,
Valle Nathalie,
Fitzpatrick Ryan,
Ekerdt John G.,
Houssiau L.,
Migeon HenriNoël
Publication year - 2011
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3532
Subject(s) - analytical chemistry (journal) , amorphous solid , calibration curve , stoichiometry , x ray photoelectron spectroscopy , chemistry , boron , secondary ion mass spectrometry , matrix (chemical analysis) , calibration , ion , mass spectrometry , crystallography , detection limit , nuclear magnetic resonance , chromatography , physics , organic chemistry , quantum mechanics
A quantitative SIMS approach using MCs + mode has been tested on boron carbonitride type films (BCN). Thick amorphous B x C y N z films of different stoichiometries (0.46 ≤ x ≤ 0.68; 0.07 ≤ y ≤ 0.43; 0.01 ≤ z ≤ 0.26), deposited by thermal chemical vapour deposition, were used as standard samples to establish calibration curves between secondary ion intensities derived from in‐depth secondary ion mass spectroscopy analyses and compositions determined by X‐ray photoelectron spectroscopy. The matrix intensity ratios I(CCs + )/I(BCs + ) and I(CCs 2 + )/I(BCs 2 + ) appear linear with the concentration ratios C C :C B ; ratios of I(NCs + )/I(BCs + ) and I(NCs 2 + )/I(BCs 2 + ) appear linear with the concentration ratio C N :C B as well. These calibration curves allow the quantification of matrix species in BCN films, in the range of studied stoichiometries and can be employed for compositional determination of unknown BCN films. Copyright © 2010 John Wiley & Sons, Ltd.