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From FIB‐SIMS to SIMS‐FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality
Author(s) -
McPhail David S.,
Li Libing,
Chater Richard J.,
Yakovlev Nikolai,
Seng Hweeleng
Publication year - 2011
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3468
Subject(s) - secondary ion mass spectrometry , focused ion beam , resolution (logic) , materials science , high resolution , nanotechnology , analytical chemistry (journal) , optoelectronics , ion , chemistry , computer science , geology , remote sensing , organic chemistry , artificial intelligence , chromatography
The FEI FIB (200) SIMS instrument is described herein, and its modes of operation outlined. The issues involved in achieving high lateral resolution analysis with good sensitivity are presented, and some examples of applications in materials science discussed. The possibility of a manufacturer developing a dedicated SIMS‐FIB instrument, i.e. a 10 nm lateral resolution SIMS instrument incorporating an FIB gun and FIB SIMS functionality (analysis, milling and channeling contrast) is explored. Copyright © 2010 John Wiley & Sons, Ltd.