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Determination of the optical constants of solar‐control amorphous silicon thin films on float glass
Author(s) -
Liu Yong,
Ni Lihong,
Liu Jun Bo,
Liu Qiying,
Song Chenlu,
Han Gaorong
Publication year - 2009
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3064
Subject(s) - float glass , refractive index , molar absorptivity , thin film , materials science , amorphous solid , amorphous silicon , annealing (glass) , optics , range (aeronautics) , analytical chemistry (journal) , spectral line , silicon , reflectivity , crystalline silicon , optoelectronics , composite material , chemistry , nanotechnology , physics , crystallography , chromatography , astronomy
An improved method employing a modified Forouhi and Bloomer disperse model with a hybridized simulated annealing algorithm is implemented in this paper, allowing the determination of refractive index, extinction coefficient, and thickness of a ‐Si films at one time by fitting reflectance and transmitted spectra. The thickness of films obtained by this method has a reasonable agreement with the result by ellipsometric measurement, especially for samples with thickness in the range of 40–80 nm. The presented method exhibits low time consumption and cost, which implies a possibility of usage in real‐time on‐line measurement of solar‐control coatings on float glass. Copyright © 2009 John Wiley & Sons, Ltd.

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