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Richardson–Lucy deconvolution of reflection electron energy loss spectra
Author(s) -
Hummel Stefan,
Gross Alexander,
Werner Wolfgang S. M.
Publication year - 2009
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.3006
Subject(s) - deconvolution , spectral line , full width at half maximum , reflection (computer programming) , energy (signal processing) , resolution (logic) , computational physics , optics , atomic physics , physics , computer science , quantum mechanics , artificial intelligence , programming language
A procedure for deconvolving the energy spread introduced by the primary beam and the analyzer in a reflection electron energy loss spectrum (REELS) has been developed. The procedure is based on the Richardson–Lucy (RL) algorithm. The approach has been successfully tested on experimental spectra by comparison with spectra with an inherent high‐energy resolution. As a typical result, it was found that the effective energy resolution of spectra with a full width half maximum (FWHM) of the elastic peak of ∼1.5 eV in the raw experimental data can be reduced to ∼0.7 eV in the deconvoluted spectra. Copyright © 2009 John Wiley & Sons, Ltd.