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Measurement of precision for developing automatic transmission electron microscope
Author(s) -
Hayashida Misa,
Kimura Yoshihide,
Takai Yoshizo
Publication year - 2008
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.2963
Subject(s) - reproducibility , transmission electron microscopy , condenser (optics) , cathode ray , electron , materials science , hysteresis , electron microscope , microscope , optics , chemistry , condensed matter physics , nanotechnology , physics , light source , chromatography , quantum mechanics
Transmission electron microscope (TEM) is one of the most useful tools for atomic‐level characterization; however, it is not user‐friendly because the condition of the electron beam in TEM changes every time it is started, that is, the reproducibility of the condition is insufficient. One of the reasons for the insufficient reproducibility is the magnetic hysteresis of the magnetic lenses used in TEM. We have found that the dumping oscillation around the set value of the condenser lens current reduces the effect of the magnetic hysteresis, and have determined the reproducibilities of the size and position of the electron beam on a sample. The results show that the reproducibilities were markedly improved. Copyright © 2008 John Wiley & Sons, Ltd.