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Development of preset‐type sample stage in three‐dimensional atom probe
Author(s) -
Ito S.,
Kaneko T.,
Yamashita C.,
Kaito T.,
Adachi T.,
Iwata T.,
Mayama N.,
Nojima M.,
Taniguchi M.,
Owari M.
Publication year - 2008
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.2942
Subject(s) - atom probe , laser , sample (material) , voltage , stage (stratigraphy) , mode (computer interface) , optics , pulse (music) , field (mathematics) , atom (system on chip) , materials science , computer science , physics , electrical engineering , engineering , geology , mathematics , paleontology , transmission electron microscopy , pure mathematics , thermodynamics , embedded system , operating system
Three‐dimensional atom probe (3DAP) equipped with a newly designed preset‐type sample stage has been developed. This new type of sample stage can reduce the costs of constructing a 3DAP instrument, and this instrument consists of quite simple components because the complicated mechanism to make any desired adjustment is no longer required to be done in a vacuum. These advantages are expected to lead to the wider distribution of 3DAP. In addition, a wider range of applications is also expected in our equipment because the atoms can be field‐evaporated by means of either high‐voltage pulses or femto‐second laser pulses. In this article, the performance of the pulse voltage mode and pulse laser mode are described and illustrated through the investigation of metals. Copyright © 2008 John Wiley & Sons, Ltd.