Gray‐body approximation to continuous X‐ray spectra from scanning electron microscope | Zendy

Tanigaki Takeshi | Zendy; Kawai Jun | Zendy

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Gray‐body approximation to continuous X‐ray spectra from scanning electron microscope

Author(s) -

Tanigaki Takeshi,

Kawai Jun

Publication year - 2008

Publication title -

surface and interface analysis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.52

H-Index - 90

eISSN - 1096-9918

pISSN - 0142-2421

DOI - 10.1002/sia.2887

Subject(s) - bremsstrahlung , scanning electron microscope , spectral line , emissivity , radiation , spectroscopy , analytical chemistry (journal) , chemistry , materials science , physics , photon , atomic physics , optics , quantum mechanics , chromatography , astronomy

The background continuum spectra interfere the quantitative elemental analysis when using a scanning electron microscope energy dispersive X‐ray (SEM‐EDX) spectroscopy. This Bremsstrahlung spectra are fitted by gray‐body radiation spectra, which is a modified black‐body radiation; an emissivity depending on the frequency of a photon is multiplied by the black‐body radiation. The agreement becomes better compared with the black‐body spectra for ordinary analysis conditions for materials analysis. Copyright © 2008 John Wiley & Sons, Ltd.

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