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Characterization of near‐field optical microscope probes
Author(s) -
Klapetek Petr,
Valtr Miroslav,
Klenovský Petr,
Buršík Jiří
Publication year - 2008
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.2784
Subject(s) - characterization (materials science) , optics , near and far field , finite difference time domain method , optical microscope , field (mathematics) , near field scanning optical microscope , microscopy , microscope , radiation , scanning probe microscopy , materials science , physics , scanning electron microscope , mathematics , pure mathematics
In this article the far‐field radiation analysis of near‐field optical probes is presented. It is shown that the quality of probes used for near‐field scanning microscopy imaging can be estimated using directional measurements of the far‐field radiation patterns. Experimental results are compared with numerical modeling of far‐field radiation performed using finite difference in time‐domain method (FDTD) and with SEM characterization of real probe geometry. The effects of probe geometry on real measurement on different samples are studied as well. Copyright © 2008 John Wiley & Sons, Ltd.