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Experimental and theoretical determination of the mixing efficiency at low‐energy Ar + bombardment: case study of the Cu/Co system
Author(s) -
Menyhard M.,
Süle P.
Publication year - 2007
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.2557
Subject(s) - auger , ion , fluence , chemistry , atomic physics , ion beam mixing , mixing (physics) , analytical chemistry (journal) , low energy , ion beam , ion beam deposition , physics , organic chemistry , quantum mechanics , chromatography
The mixing of a Co/Cu bilayer induced by low‐energy ion bombardment was studied by AES depth profiling and molecular dynamic (MD) simulation. The conditions of the ion bombardment were as follows: Ar + ion, 1 keV energy, 82° angle of incidence (with respect to the surface normal). In AES depth profiling, the in‐depth concentration distribution was estimated from the measured Auger intensities assuming that the in‐depth distribution is an erf function. The variance (σ 2 ) of the erf function gave the broadening of the interface due to ion bombardment, which divided by the fluence (Φ) and deposited energy ( F D given by SRIM) gave the mixing efficiency (σ 2 /Φ F D ) to be 0.08 ± 0.01 nm 5 /keV. The mixing efficiency calculated by MD, 0.09 nm 5 /keV, agreed well with that estimated from the experimental data, and both have been close to the value assuming ballistic mixing. Copyright © 2007 John Wiley & Sons, Ltd.