Recent results on the use of model resolution functions for the deconvolution of depth profiling data | Zendy

Kotz Samuel | Zendy; Nadarajah Saralees | Zendy

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Recent results on the use of model resolution functions for the deconvolution of depth profiling data

Author(s) -

Kotz Samuel,

Nadarajah Saralees

Publication year - 2007

Publication title -

surface and interface analysis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.52

H-Index - 90

eISSN - 1096-9918

pISSN - 0142-2421

DOI - 10.1002/sia.2542

Subject(s) - deconvolution , profiling (computer programming) , gaussian , exponential function , algorithm , computer science , resolution (logic) , mathematics , simple (philosophy) , mathematical analysis , artificial intelligence , chemistry , computational chemistry , philosophy , epistemology , operating system

The paper by Markarov [ Surface and Interface Analysis , 20 , 1993, pp. 821–826] considered the important problem of deconvolution of depth profiling data. In this note, we consider the problem of convoluting the initial Gaussian profile with a double exponential resolution function. The paper by Markarov only provided an asymptotic treatment of this problem. Here, we provide exact results, various approximations as well as a simple computer program. Copyright © 2007 John Wiley & Sons, Ltd.

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