Summary of ISO/TC 201 Standard: XXIII, ISO 24236:2005—surface chemical analysis—Auger electron spectroscopy—repeatability and constancy of intensity scale | Zendy

Seah M. P. | Zendy

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Summary of ISO/TC 201 Standard: XXIII, ISO 24236:2005—surface chemical analysis—Auger electron spectroscopy—repeatability and constancy of intensity scale

Author(s) -

Seah M. P.

Publication year - 2007

Publication title -

surface and interface analysis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.52

H-Index - 90

eISSN - 1096-9918

pISSN - 0142-2421

DOI - 10.1002/sia.2493

Subject(s) - repeatability , calibration , intensity (physics) , auger electron spectroscopy , spectrometer , scale (ratio) , analytical chemistry (journal) , auger , energy (signal processing) , atomic physics , chemistry , optics , computational physics , physics , nuclear physics , mathematics , statistics , chromatography , quantum mechanics

This International Standard specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function.1,2 That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given to some of the instrumental settings that may affect this constancy. © Crown Copyright 2006. Reproduced with the permission of the Controller of HMSO.

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