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Improvement of a method for reconstructing the three‐dimensional atom probe (3DAP) data
Author(s) -
Chiba T.,
Nojima M.,
Owari M.
Publication year - 2006
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.2445
Subject(s) - atom probe , cluster (spacecraft) , position (finance) , data set , atom (system on chip) , physics , atomic physics , optics , computer science , artificial intelligence , finance , transmission electron microscopy , embedded system , economics , programming language
A method for reconstructing the three‐dimensional atom probe (3DAP) data with cluster ions, which are composed of the so‐called undetected atoms , has been developed. The position and structure of clusters composed of undetected atoms may be determined by taking into account the number of atoms within a sphere that centers at a grid‐point set in the reconstructed 3DAP data. On the basis of the simulation data, it was demonstrated that the position of each undetected atom constituting a cluster with nine or fewer atoms could be determined using the method proposed. Copyright © 2006 John Wiley & Sons, Ltd.