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Fine pattern fabrication on SnO 2 :Sb thin films formed by the sol–gel process
Author(s) -
Ying Li,
Gaoyang Zhao,
Weihua Zhang,
Yuanqing Chen
Publication year - 2006
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.2442
Subject(s) - thin film , materials science , irradiation , sol gel , fabrication , substrate (aquarium) , absorption (acoustics) , analytical chemistry (journal) , conductivity , doping , alkoxide , x ray photoelectron spectroscopy , chemical engineering , nuclear chemistry , nanotechnology , chemistry , optoelectronics , composite material , chromatography , catalysis , organic chemistry , medicine , oceanography , physics , alternative medicine , pathology , geology , nuclear physics , engineering
Abstract The effects of UV irradiation on the properties of Sb 5+ doped gel films were studied, which were prepared from stannic chloride (SnCl 4 ·5H 2 O) and sodium alkoxide (NaOR) modified with benzytone (BzAcH). It was found that the absorption peak at around 335 nm due to the π → π* transition showed the formation of a chelate ring to Sn. The intensity of the absorption band decreased with UV light irradiation at 365 nm from a high‐pressure mercury lamp (250W). This finding showed that the SnO 2 :Sb gel films modified with BzAcH were photosensitive to UV light. Additionally, this finding was applied to the fabrication of patterns on the SnO 2 :Sb thin films. A gel film was irradiated through a mask and leached in water. Then a positive pattern was formed on the SnO 2 :Sb thin films attached to the substrate. After heat treatment, the SnO 2 :Sb gel films changed into transparent conductive films with an average conductivity of 1.20 × 10 −2 Ω cm and with a transmission of 97.1%. Copyright © 2006 John Wiley & Sons, Ltd.