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Monte Carlo modeling of electron‐excited X‐ray emission from bulk materials and thin‐film/substrate systems
Author(s) -
Nagatomi T.
Publication year - 2005
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.2106
Subject(s) - ionization , excited state , emission spectrum , spectral line , atomic physics , monte carlo method , electron , substrate (aquarium) , line (geometry) , x ray , electron shell , chemistry , physics , ion , optics , statistics , mathematics , oceanography , geometry , quantum mechanics , astronomy , geology , organic chemistry
A Monte Carlo (MC) simulation model for the calculation of electron‐excited X‐ray spectra was developed. The model includes characteristic K‐ and L‐lines and continuous X‐ray emission by electron impact, fluorescent X‐ray emission following absorption of continuous and characteristic X rays, L‐line X‐ray emission following K‐shell ionization and Coster‐Kronig transitions. The simulated spectra were directly compared with experimental spectra without any fitting parameters. This comparison revealed that continuous X‐ray and K‐line peak intensities can be well reproduced by the present simulation. The applications of Gryzinski's and Casnati's ionization cross sections to L‐shell ionization resulted in underestimation of the L‐line peak intensity by 10 to ∼30% and overestimation by 20 to ∼40%, respectively. Casnati's equation was found to be applicable to describing L‐shell ionization by MC modeling when the Coster‐Kronig transition was neglected. Copyright © 2005 John Wiley & Sons, Ltd.