Premium
Nitrogen analysis using energetic ion beams
Author(s) -
Jiang W.,
Shutthanandan V.,
Thevuthasan S.,
Wang C. M.,
Weber W. J.
Publication year - 2005
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1991
Subject(s) - nuclear reaction analysis , scattering , ion beam analysis , ion , nuclear reaction , atomic physics , rutherford scattering , rutherford backscattering spectrometry , amorphous solid , irradiation , elastic scattering , chemistry , nuclear physics , materials science , analytical chemistry (journal) , ion beam , inelastic scattering , physics , optics , crystallography , x ray raman scattering , organic chemistry , chromatography
As a special case of nuclear reaction analysis (NRA), nuclear elastic scattering analysis (or non‐Rutherford scattering analysis) is one of the important methods in ion beam analysis and is the preferred technique to analyze light elements in a heavy matrix. Compared with nuclear reaction, nuclear scattering usually has cross‐sections several orders of magnitude larger, which allows quantitative analysis of light elements in a quicker and more convenient manner. Similar to NRA, this method complements the analysis of widely used Rutherford backscattering spectrometry. In this study, the scattering cross‐sections for 14 N(p,p) 14 N and 14 N(α,α) 14 N at a laboratory angle of 150° are measured over energy regions from 2.480 to 3.774 MeV using an amorphous film of Si 3 N 4 on Si wafer. Examples for the analysis of lattice disorder on the nitrogen sublattice in Au 2+ ‐irradiated GaN single crystals will be demonstrated. Copyright © 2005 John Wiley & Sons, Ltd.