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Ultimate sized nano‐dots formed by electron beam‐induced deposition using an ultrahigh vacuum transmission electron microscope
Author(s) -
Tanaka M.,
Shimojo M.,
Han M.,
Mitsuishi K.,
Furuya K.
Publication year - 2005
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1978
Subject(s) - transmission electron microscopy , electron beam induced deposition , tungsten , materials science , electron microscope , deposition (geology) , cathode ray , high resolution transmission electron microscopy , nano , nanotechnology , ultra high vacuum , scanning electron microscope , particle size , electron , chemistry , optics , composite material , scanning transmission electron microscopy , metallurgy , physics , paleontology , quantum mechanics , sediment , biology
We have successfully fabricated nano‐dots containing tungsten or gold from metal‐organic gas sources by electron beam‐induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO) 6 is ∼1.5 nm in diameter, which is close to the theoretical resolution limit. Copyright © 2005 John Wiley & Sons, Ltd.