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Quantitative analyses of impurities in ZnO
Author(s) -
Sakaguchi Isao,
Hishita Syunichi
Publication year - 2004
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1904
Subject(s) - impurity , analytical chemistry (journal) , ion , hydrogen , secondary ion mass spectrometry , chemistry , hydrothermal circulation , mass spectrometry , resolution (logic) , interference (communication) , crystal (programming language) , zinc , environmental chemistry , chemical engineering , chromatography , telecommunications , channel (broadcasting) , organic chemistry , artificial intelligence , computer science , engineering , programming language
Problems on the quantitative analyses of impurities in secondary ion mass spectrometry (SIMS) were revealed by analysing standard samples. One problem is the interference confirmed when 27 Al 16 O, 63 Cu and 67 Zn 16 O negative ions were measured, which can be avoided by measuring a high‐resolution mass spectrum. Another problem is that light elements such as hydrogen can be measured accurately only after using a cooling system to reduce the background intensity. These remedies were applied in the quantitative analysis of single‐crystal ZnO grown by hydrothermal and vapour transport techniques. Copyright © 2004 John Wiley & Sons, Ltd.