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Characterization of the interface of PZT sol–gel layers on metallic substrates
Author(s) -
Dutschke Anke,
Meinhardt Jürgen
Publication year - 2004
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1872
Subject(s) - characterization (materials science) , interface (matter) , materials science , metal , sol gel , nanotechnology , composite material , metallurgy , contact angle , sessile drop technique
Ferroelectric lead zirconate titanate layers can be used for several industrial applications. Usually they are prepared as thin films on silicon substrates with different ground electrodes to be integrated into microelectronic devices. Thin steel substrates are of special interest because of their flexibility which enables several new applications in sensors and actuators. These applications require a film thickness of several micrometres, which can be achieved by several coating and annealing steps. We have studied the interfaces of sol–gel derived PZT (53/47) layers on a commercially available CrNi alloy in view of formation of secondary phases and diffusion processes, using transmission electron microscopy (TEM) combined with energy dispersive x‐ray spectroscopy (EDX) and XPS. The effect of different thermal annealing treatments on the thickness of a non‐ferroelectric interface containing NiO and NiCr 2 O 4 between the steel substrate and PZT film was studied. The diffusion of Cr from the metallic substrate into the PZT layer during the annealing process leads to formation of Pb 2 (CrO 4 )O at the interface. The results are related to the electrical properties of the films. Copyright © 2004 John Wiley & Sons, Ltd.