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Calibration of various analytical methods with heavy‐ion ERDA
Author(s) -
Bohne W.,
Lindner S.,
Röhrich J.,
Strub E.
Publication year - 2004
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1847
Subject(s) - elastic recoil detection , analytical chemistry (journal) , mass spectrometry , chemistry , ion , ion beam analysis , secondary ion mass spectrometry , calibration , spectrometer , stoichiometry , ion beam , optics , physics , organic chemistry , chromatography , quantum mechanics
Heavy‐ion ERDA (elastic recoil detection analysis) can be used to characterize thin solid layers. Absolute concentrations of the chemical elements can be detected as well as the layers' thickness and depth profiles. For the measurement, the sample is irradiated with a heavy‐ion beam. Atoms of the sample are recoiled and detected with an energy and mass dispersive spectrometer. Since the ERDA principle is based on the classical Rutherford scattering theory, the expected yields for the given conditions can be calculated exactly. Therefore, ERDA is a standard‐free method. Absolute concentrations can be determined for all detected chemical elements simultaneously. By comparison with ERDA measurements an FT‐IR (Fourier transform–infrared) spectrometer, routinely used to determine the stoichiometry of ZnO layers, was calibrated. Artefacts in SIMS (secondary ion mass spectrometry) data for the characterization of chalcopyrite based solar cell absorbers are ruled out. Copyright © 2004 John Wiley & Sons, Ltd.