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Surface smoothing of single‐crystal diamond by high‐speed cluster impacts with and without reactive erosion
Author(s) -
Krämer Ralf,
Yamaguchi Yasutaka,
Gspann Jürgen
Publication year - 2004
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1674
Subject(s) - diamond , cluster (spacecraft) , erosion , surface finish , surface roughness , smoothing , crystal (programming language) , synthetic diamond , materials science , chemistry , chemical physics , crystallography , mineralogy , metallurgy , composite material , geology , geomorphology , computer science , computer vision , programming language
The smoothness of cluster‐eroded surfaces of natural and synthetic diamond (Monodite) is compared after erosion with high‐speed CO 2 as well as Ar cluster beams. The reactive accelerated cluster erosion (RACE) of the single‐crystal diamond substrates using CO 2 clusters leads to a fourfold larger root‐mean‐square roughness than the erosion with non‐reactive Ar clusters. On the other hand, the erosion rate observed with the accelerated Ar clusters is lower by about the same factor than that observed with the accelerated CO 2 clusters. Molecular dynamics calculations reveal corresponding differences already in the simulations of single cluster impacts. Copyright © 2004 John Wiley & Sons, Ltd.