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Electrical characterization of radiofrequency glow discharge used for optical emission spectroscopy
Author(s) -
Belenguer Ph.,
Guillot Ph.,
Therese L.
Publication year - 2003
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1581
Subject(s) - glow discharge , plasma , characterization (materials science) , spectroscopy , voltage , atomic physics , current density , emission spectrum , electric field , materials science , current (fluid) , electric discharge , chemistry , analytical chemistry (journal) , electrode , electrical engineering , physics , nanotechnology , spectral line , engineering , quantum mechanics , astronomy , chromatography
This paper considers the electrical characterization of radiofrequency glow discharge plasmas used for optical emission spectroscopy. The total discharge current and the applied voltage are measured using conventional techniques. With a simple analytical approach and using adequate assumptions that will be detailed in the paper, we show that it is possible to estimate the different components of the total discharge current and to characterize electrically the sheath and the plasma region of the discharge. This allows information to be obtained on the electric field on the sample, the sheath length, the ion density in the sheath and the plasma density. Copyright © 2003 John Wiley & Sons, Ltd.