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Theory of relative sputtering rates in GDOES
Author(s) -
Payling Richard,
Aeberhard Max,
Michler Johann,
Authier Cyril,
Chapon Patrick,
Nelis Thomas,
Pitchford Leanne
Publication year - 2003
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1536
Subject(s) - sputtering , glow discharge , aluminium , alloy , range (aeronautics) , materials science , analytical chemistry (journal) , plasma , chemistry , metallurgy , thin film , composite material , physics , nanotechnology , chromatography , quantum mechanics
A detailed theory of relative sputtering rates for glow discharge optical emission spectroscopy (GDOES) is presented for the first time. The theory suggests that such sputtering rates should be nearly independent of plasma conditions. This is supported by experimental results for r.f. GDOES under varying applied power or varying pressure. Relative sputtering rates are calculated for a range of cast irons, high‐alloy steels and zinc–aluminium alloys. Within measurement uncertainties, the calculated rates agree with measured relative sputtering rates. Copyright © 2003 John Wiley & Sons, Ltd.