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Chemical maps of patterned samples by microline‐imaging laser‐induced plasma spectrometry
Author(s) -
Cabalín L. M.,
Mateo M. P.,
Laserna J. J.
Publication year - 2003
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1524
Subject(s) - laser , plasma , spectrograph , optics , imaging spectrometer , materials science , resolution (logic) , impact crater , mass spectrometry , image resolution , analytical chemistry (journal) , spectrometer , chemistry , spectral line , physics , chromatography , quantum mechanics , astronomy , artificial intelligence , computer science
The potential of a microline‐imaging laser‐induced plasma spectrometry (LIPS) system for surface and depth analysis of heterogeneous solid samples in air at atmospheric pressure has been demonstrated. A pulsed Nd : YAG laser beam operating at 532 nm, with a homogeneous energy distribution (flat top laser), was used to generate a microline plasma on the sample surface. Subsequent light from the microline plasma was resolved spectrally and spatially and detected with an imaging spectrograph and an intensified charged‐coupled device detector. A patterned metal sample was chosen as the most appropriate for this study. Three‐dimensional chemical maps of Ni and Cu from the edge connectors of a printed circuit board have been obtained. With this experimental configuration, the lateral resolution (limited by crater width) was 42 µm and the spatial resolution along the spectrometer slit was 17.4 µm. The results illustrate the capability of microline imaging for fast mapping of large‐area samples and for depth profiling purposes. Copyright © 2003 John Wiley & Sons, Ltd.