Study of Zr 1− x  Sn  x  TiO 4  thin films prepared by a polymeric precursor route | Zendy

Gusmano G. | Zendy; Bianco A. | Zendy; Viticoli M. | Zendy; Kaciulis S. | Zendy; Mattogno G. | Zendy; Pandolfi L. | Zendy

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Study of Zr 1− x Sn x TiO 4 thin films prepared by a polymeric precursor route

Author(s) -

Gusmano G.,

Bianco A.,

Viticoli M.,

Kaciulis S.,

Mattogno G.,

Pandolfi L.

Publication year - 2002

Publication title -

surface and interface analysis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.52

H-Index - 90

eISSN - 1096-9918

pISSN - 0142-2421

DOI - 10.1002/sia.1389

Subject(s) - x ray photoelectron spectroscopy , thin film , materials science , stannate , zirconium , oxidizing agent , titanium , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , metallurgy , zinc , organic chemistry , engineering , chromatography

Zirconium–stannate titanate Zr 1− x Sn x TiO 4 (ZTS) thin films, undoped and doped with Sb, Ta and Nb, were prepared by a polymeric precursor technique. The ZTS films were deposited on the multilayered substrates (Pt/Ti/SiO 2 /Si) by means of multiple spin‐coating. After this deposition, the samples were heated at different temperatures (300–700°C). The chemical composition of these films and bulk ZTS samples was investigated by using x‐ray photoelectron spectroscopy and selected‐area XPS depth profiling. A partial surface segregation of Sn IV and the presence of Sn 0 , Ti II and Ti III species in the films were revealed from XPS depth profiles. An optimized ZTS deposition process, where an oxidizing agent (H 2 O 2 ) is added to the gel, is proposed. Copyright © 2002 John Wiley & Sons, Ltd.

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