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Study of Zr 1− x Sn x TiO 4 thin films prepared by a polymeric precursor route
Author(s) -
Gusmano G.,
Bianco A.,
Viticoli M.,
Kaciulis S.,
Mattogno G.,
Pandolfi L.
Publication year - 2002
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1389
Subject(s) - x ray photoelectron spectroscopy , thin film , materials science , stannate , zirconium , oxidizing agent , titanium , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , metallurgy , zinc , organic chemistry , engineering , chromatography
Zirconium–stannate titanate Zr 1− x Sn x TiO 4 (ZTS) thin films, undoped and doped with Sb, Ta and Nb, were prepared by a polymeric precursor technique. The ZTS films were deposited on the multilayered substrates (Pt/Ti/SiO 2 /Si) by means of multiple spin‐coating. After this deposition, the samples were heated at different temperatures (300–700°C). The chemical composition of these films and bulk ZTS samples was investigated by using x‐ray photoelectron spectroscopy and selected‐area XPS depth profiling. A partial surface segregation of Sn IV and the presence of Sn 0 , Ti II and Ti III species in the films were revealed from XPS depth profiles. An optimized ZTS deposition process, where an oxidizing agent (H 2 O 2 ) is added to the gel, is proposed. Copyright © 2002 John Wiley & Sons, Ltd.