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Absolute energy calibration in an energy analyser (CMA) using elastically backscattered primary electrons: iterative method
Author(s) -
Goto K.,
Nissa Rahman N.,
Jiang Y. Z.,
Asano Y.,
Shimizu R.
Publication year - 2002
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1207
Subject(s) - analyser , electron , calibration , kinetic energy , atomic physics , thermionic emission , computational physics , tungsten , physics , photoelectric effect , voltage , magnetic field , convolution (computer science) , chemistry , optics , nuclear physics , quantum mechanics , organic chemistry , machine learning , artificial neural network , computer science
Energy calibration in an Auger electron analyser has been studied using elastically backscattered primary electrons (BPEs), with a feasibility of 15 meV(σ) for the kinetic energies of 10–1200 eV in which our improved cylindrical mirror analyser (CMA) has been used. An electron gun with a special tungsten cathode of reduced magnetic field and having unipotential was operated in constant emission current mode. This mode presents the well‐defined characteristics of the BPEs. Thus, the energy distribution of the BPEs and the shape and the peak position would be kept constant irrespective of the acceleration voltage of the BPEs. An iteration method (between the higher and lower energies) was employed to obtain the transfer coefficient of the CMA, i.e. a self‐consistent method with automatic corrections for the thermionic emission and the work functions. A convolution simulation of the CMA was examined to obtain the right peak position of the BPEs. It was found that the broader diameter of the BPE beams can be used in the calibration without any appreciable loss of accuracy. Copyright © 2002 John Wiley & Sons, Ltd.