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Combining micro‐PIXE surface scans with cross‐sectional X‐ray maps to characterize multilayer structures
Author(s) -
Nickel J.,
Shuaib A. N.
Publication year - 2002
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1184
Subject(s) - materials science , characterization (materials science) , cross section (physics) , rake , layer (electronics) , machining , aluminium , particle (ecology) , deposition (geology) , surface layer , composite material , nanotechnology , metallurgy , mechanical engineering , physics , oceanography , quantum mechanics , sediment , geology , engineering , biology , paleontology
Multilayer characterization traditionally involves the direct analysis of the sample cross‐section, which is destructive by its nature. Alternatively, an indirect and non‐destructive method to obtain a model of the multilayer structures in question is achieved by means of the micro‐particle‐induced X‐ray emission (micro‐PIXE) technique. This paper presents a method that utilizes both micro‐PIXE surface scan data and electron‐induced X‐ray maps generated from the specimen cross‐section to characterize a multilayer structure, including layer composition, thickness, boundary and density. The proposed approach is demonstrated by characterizing the work material transfer and deposition in a two‐layer structure onto the rake face of an uncoated WC–Co tool insert used for machining aluminium. The use of the direct cross‐sectional approach allowed an evaluation of the capabilities and limitations of the indirect micro‐PIXE approach. Copyright © 2002 John Wiley & Sons, Ltd.