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Piezoresistive SXM sensors
Author(s) -
Rangelow I. W.,
Grabiec P.,
Gotszalk T.,
Edinger K.
Publication year - 2002
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1162
Subject(s) - cantilever , microprobe , piezoresistive effect , fabrication , materials science , nanotechnology , scanning probe microscopy , resolution (logic) , microscopy , capacitance , optoelectronics , chemistry , optics , composite material , mineralogy , electrode , physics , medicine , alternative medicine , pathology , artificial intelligence , computer science
The design, fabrication and evaluation of various microprobes for applications in scanning probe microscopy are presented. A piezoresistive cantilever with an integrated micro‐tip, as a basic structure, enables surface topography measurements with a resolution up to 0.1 nm. A conductive tip isolated from the cantilever was introduced for scanning capacitance microscopy and scanning electrostatic force microscopy. With this microprobe a capacitance between the micro‐tip and the surface in the range of 10 −22 F could be measured. Modification of the cantilever shape permits fabrication of the multipurpose systems for lateral force microscopy, which enables measurement of friction forces with a resolution of 1 nN. A femtocalorimeter for the detection of heat energy in the range of 50 nW Hz −0.5 was developed. A microbalance cantilever for ‘electronic nose’ applications makes it possible to determine picogram mass changes induced by chemical reactions in chemically sensitive coatings. A scanning near‐field thermal nanoprobe combines a thermal resolution of 10 −3 K with a spatial resolution of 20 nm. Copyright © 2002 John Wiley & Sons, Ltd.