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Optical characterization techniques for process monitoring
Author(s) -
Pickering C.
Publication year - 2001
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1128
Subject(s) - characterization (materials science) , process (computing) , computer science , nanotechnology , materials science , operating system
The aim of this special issue is to bring to the attention of the surface science community the potential and application of optical techniques. This paper gives an overview of the major optical characterization techniques and the subsequent papers. Where possible, links with other surface science techniques are discussed and the use of optical methods for process monitoring and control is emphasized. © Crown Copyright 2001. Published by John Wiley & Sons, Ltd.