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Analysis of inhomogeneous thin films of ZrO 2 by the combined optical method and atomic force microscopy
Author(s) -
Franta D.,
Ohlídal I.,
Klapetek P.,
Pokorný P.,
Ohlídal M.
Publication year - 2001
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.1013
Subject(s) - reflectometry , refractive index , ellipsometry , materials science , thin film , atomic force microscopy , surface finish , optics , optical microscope , analytical chemistry (journal) , molecular physics , chemistry , nanotechnology , scanning electron microscope , physics , optoelectronics , composite material , time domain , chromatography , computer science , computer vision
In this paper results concerning the complete optical analysis of inhomogeneous ZrO 2 films are introduced. The optical analysis of these films is carried out using the combined optical method based on interpreting experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near‐normal incidence spectroscopic reflectometry (NNSR). The model of the ZrO 2 films used for interpretation of the experimental data achieved using the combined method exhibits a continuous refractive index profile. It is shown that this model is satisfactory for treating the experimental data. Further, it is shown that all the parameters characterizing the model mentioned can be determined with high accuracy. By means of atomic force microscopy (AFM) it is found that the upper boundaries of the inhomogeneous ZrO 2 films are slightly rough. The values of the basic statistical quantities characterizing this boundary roughness are evaluated using the AFM data. The optical inhomogeneity of the ZrO 2 films studied is explained by the columnar structure of these films. Copyright © 2001 John Wiley & Sons, Ltd.