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P‐1.9: Huge Mobility Enhancement of ITZO TFTs achieved via Ta‐Induced Crystallization
Author(s) -
Wang Xiaolong,
Zhang Hengbo,
Wu Zhendong,
Liang Lingyan,
Cao Hongtao
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.15257
Subject(s) - chinese academy of sciences , zhàng , engineering , engineering physics , science and engineering , library science , china , engineering ethics , computer science , political science , law
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