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P‐1.3: Novel Top Gate Oxide Thin Film Transistor: With Top Light Shielding Metal Structure
Author(s) -
Lu Macai,
Liu Nian,
Gao Lu,
Mei Xueru,
Liu Minggang,
Li Zhuhui,
Feng Zhengyu,
Yao Jiangbo
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.15251
Subject(s) - china , semiconductor , chinese academy of sciences , star (game theory) , materials science , engineering physics , optoelectronics , engineering , physics , geography , archaeology , astrophysics
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