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48.2: Dark Alloyed Metal‐Oxides for Sputter Deposition: Material comparison and processability
Author(s) -
Schmidt Hennrik,
Koestenbauer Harald,
Franzke Enrico,
Lorenz Dominik,
Linke Christian,
Winkler Joerg
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.15210
Subject(s) - materials science , stoichiometry , oxide , metal , thin film , molybdenum , sputtering , sputter deposition , deposition (geology) , nanotechnology , metallurgy , chemical engineering , chemistry , paleontology , sediment , engineering , organic chemistry , biology
Metal‐oxides (MeOx), for example electrical conducting sub‐stoichiometric Molybdenum‐Oxide (MoOx) can be used to create dark layers to cover otherwise reflective lines. While the optical properties are well developed and understood, this work focuses on the investigation of chemical stability, relevant for process integration. For this we analyze and compare different alloys and summarize the thin film properties for different applications.