Premium
41.3: A New Inspection and Review Solution with EFIB Accelerating the Yield Ramp of Display Panel Manufacturing
Author(s) -
Peng Pai,
Meng Lin,
Li Lingjia,
Geng Tao,
Mei Xiaohan,
Knaub Nikolai,
Shen Lei,
Li Xiao,
Wu Chengye
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.15179
Subject(s) - yield (engineering) , process (computing) , reliability engineering , beam (structure) , engineering , computer science , structural engineering , materials science , operating system , metallurgy
A new inspection and review solution has been introduced with the adoption of display industry's first inline EFIB (Electron Beam Review — Focused Ion Beam) system. Combined with AOI (auto optical inspection), Array tester and repair system, it provides critical information for failure analysis in a timely and cost‐effective manner. It has the capabilities of performing in‐depth and reliable failure analysis in active area, GOA (gate on array) and fanout area. In this paper, we present a number of EFIB applications during the yield ramp phase, demonstrating the value of this new solution in accelerating the yield ramp up process.