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25.6: A Study on Micro‐LED Stamp Transfer Technology: Requirement and Challenges
Author(s) -
Wang Yan,
Dong Xiaobiao,
Han Saisai,
Song Yuhua,
Sheng Cuicui,
Wang Chenggong,
Huang Xiuqi,
Ge Yong
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.15118
Subject(s) - flatness (cosmology) , brightness , computer science , key (lock) , mechanical engineering , engineering , operating system , optics , physics , cosmology , quantum mechanics
Micro‐LED is an emerging technology that is believed to be the next generation of display technology after OLED, due to its higher brightness and longer life time. Mass transfer is a key component towards the mass production of micro‐LED manufacture. Among all efforts to make micro‐LED display a reality, PDMS stamp transprint is the mainstream solution that is, so far, ahead of the game than all the other approaches. A key requirement for PDMS transfer is the quality of the stamp, more specifically, in the aspects of flatness uniformity, sticky force level, materials processing, and size enlarging. Based on these perceptions, we endeavored to achieve a ∼3cm×4cm area stamp that has overall flatness in the order of a few microns, through the efforts of optimizing fabrication hardware, materials processing and designing special tools.