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8.1: Self‐aligned top gate TFTs with LnIZO as channel material
Author(s) -
Li Min,
Xu Hua,
Zou Jianhua,
Tao Hong,
Wang Lei,
Peng Junbiao,
Xu Miao
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.15042
Subject(s) - optoelectronics , materials science , luminescence , china , engineering physics , telecommunications , engineering , political science , law
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