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P‐31: Novel Calibration Methods to Calculate the Effective Capacitance of Gate line in LTPS Display
Author(s) -
Tao Jian,
Wang Yong,
Feng Shuai,
Li Yafeng,
Peng Zhong,
He Jian
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14905
Subject(s) - capacitance , line (geometry) , calibration , production line , parasitic capacitance , electronic engineering , materials science , computer science , mathematics , physics , engineering , electrode , statistics , mechanical engineering , quantum mechanics , geometry
In order to improve our design accuracy and narrow the gap between the design and actual value, we have done some investigations on measuring the effective capacitance of gate lines. We have proposed two method: one is integration method, and another is fitting method. The former is more accurate than the latter. And we find the relationship between effective capacitance and total capacitance of gate line can be described well by one‐dimensional RC‐chain circuit derived from Elmore model. Based on this, we can conclude an empirical coefficient which is suitable for our LTPS production line.