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56‐5: Image Sensor Using IGZO‐TFT Backplane with Sacrificial Barrier Layer for X‐Ray Detector
Author(s) -
Zhan Xiangmi,
Cheng Jin,
Hou Xuecheng,
Li Cheng,
Che Chuncheng
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14802
Subject(s) - backplane , thin film transistor , optoelectronics , materials science , plasma display , detector , layer (electronics) , flat panel detector , flat panel , barrier layer , amorphous solid , x ray detector , plasma , voltage , electrical engineering , optics , nanotechnology , engineering , electrode , physics , chemistry , quantum mechanics , organic chemistry
Amorphous IGZO TFT arrays have been developed as backplanes for 17ç17 inch flat panel X‐ray detector. A sacrificial barrier layer (SBL) is introduced to protect the a‐IGZO channel from H plasma atmosphere, which can effectively solve the problem of negative threshold voltage (V th ) shift and/or even TFT continuously turn‐on.