56‐5: Image Sensor Using IGZO‐TFT Backplane with Sacrificial Barrier Layer for X‐Ray Detector | Zendy

Zhan Xiangmi | Zendy; Cheng Jin | Zendy; Hou Xuecheng | Zendy; Li Cheng | Zendy; Che Chuncheng | Zendy

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56‐5: Image Sensor Using IGZO‐TFT Backplane with Sacrificial Barrier Layer for X‐Ray Detector

Author(s) -

Zhan Xiangmi,

Cheng Jin,

Hou Xuecheng,

Li Cheng,

Che Chuncheng

Publication year - 2021

Publication title -

sid symposium digest of technical papers

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.351

H-Index - 44

eISSN - 2168-0159

pISSN - 0097-966X

DOI - 10.1002/sdtp.14802

Subject(s) - backplane , thin film transistor , optoelectronics , materials science , plasma display , detector , layer (electronics) , flat panel detector , flat panel , barrier layer , amorphous solid , x ray detector , plasma , voltage , electrical engineering , optics , nanotechnology , engineering , electrode , physics , chemistry , quantum mechanics , organic chemistry

Amorphous IGZO TFT arrays have been developed as backplanes for 17ç17 inch flat panel X‐ray detector. A sacrificial barrier layer (SBL) is introduced to protect the a‐IGZO channel from H plasma atmosphere, which can effectively solve the problem of negative threshold voltage (V th ) shift and/or even TFT continuously turn‐on.

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