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33‐6: Roll‐To‐Plate Nano‐Imprint Lithography for High‐Volume Production of AR Glasses: Equipment, Materials, and Processes
Author(s) -
Meulen Jan Matthijs Ter,
Pim Veldhuizen L.W.,
Sander Kommeren A.S.,
Willems Ard A. G.,
Dielen Marc,
Driessen Elisa,
Neelen Rob A.W.,
Ercan Erhan,
Tam Kar Kit Gary,
Titulaer Bram J.F.
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14713
Subject(s) - nanoimprint lithography , lithography , materials science , wafer , nanotechnology , nano , volume (thermodynamics) , optoelectronics , composite material , fabrication , physics , medicine , alternative medicine , pathology , quantum mechanics
Today, the prevailing AR‐glasses displays are using waveguides. The light in‐ & outcoupling structures that these glasses contain can be made by UV nanoimprint lithography. Nanoimprint lithography tools have typical cycle times of around 40 imprints per hour, roughly resulting in 8M eyepieces per year made on 300mm wafers. To serve the projected mass market adoption, hundreds of imprint tools will be needed. An important question is how the eyepieces can be made more efficiently and cost‐effectively. The Morphotonics' Roll‐to‐Plate imprint technology enables high volume production, having the opportunity for large‐area imprinting, manufacturing multiple products in a single imprint step.