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11‐1: Sensitivity Analysis of Mechanical Parameters to Tensile Wrinkle in Fine Metal Mask
Author(s) -
Liu Yue,
Bai Shanshan,
Li Yansong,
Bi Na,
Shen Kuo,
Li Na
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14626
Subject(s) - wrinkle , ultimate tensile strength , materials science , deposition (geology) , sensitivity (control systems) , composite material , mixing (physics) , metal , metallurgy , engineering , electronic engineering , physics , paleontology , quantum mechanics , biology , sediment
Fine metal mask (FMM) is an important component in vacuum deposition technology. The FMM wrinkles produced during the tensile process usually bring about many drawbacks, such as uneven deposition, shadowing effects and color mixing. This paper discusses the effect of material parameters of FMM on its tensile wrinkle.