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9‐5: Picosecond‐Laser Blackening of TFT Side Films: A New Technology for Bright‐Pixel Repair
Author(s) -
HAN Hai-bin,
WANG He-wei,
WANG Bin,
LIU Tao,
QIAO Lv-hua,
LENG Hao
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14622
Subject(s) - thin film transistor , materials science , transmittance , laser , optoelectronics , picosecond , pixel , shading , optics , computer science , computer graphics (images) , nanotechnology , physics , layer (electronics)
In this paper, for the first time, picosecond laser was used to blacken the TFT side of LCD panel pixels. And this is a new technology to repair the bright pixel. The purpose of shading was successfully realized and the effect of darkening was achieved. And through a series of characterization to explore the mechanism of film darkening: laser through the TFT substrate glass, a part of the ITO film falls off and is formed by the laser impact into the Si 3 N x film, the reduction reaction occurs with H in Si3N4 to produce black InO and SnO, Thus, the transmittance of the film is reduced and pixel shading is completed.