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7‐1: Distinguished Paper: Reliability Improvement of IGZO‐TFT in Hybrid Process with LTPS
Author(s) -
Aman Mehadi,
Takeda Yujiro,
Ito Kazuatsu,
Yamamoto Kaoru,
Tanaka Kohei,
Matsukizono Hiroshi,
Nakamura Wataru,
Makita Naoki
Publication year - 2021
Publication title -
sid symposium digest of technical papers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.351
H-Index - 44
eISSN - 2168-0159
pISSN - 0097-966X
DOI - 10.1002/sdtp.14609
Subject(s) - amoled , backplane , reliability (semiconductor) , thin film transistor , cmos , materials science , electrical engineering , optoelectronics , electronic engineering , power (physics) , engineering , active matrix , nanotechnology , layer (electronics) , quantum mechanics , physics
An AMOLED panel using hybrid backplane technology based on p‐type LTPS and n‐type oxide has been successfully manufactured. New pixel and Gate‐on‐Array (GOA) circuits were designed and fabricated using this technology. CMOS operation of the GOA is realized by utilizing both IGZO and p‐LTPS. The hybrid backplane AMOLED panel can operate between 1 Hz and 120 Hz, which enables both high refresh rate and low standby power display applications. Furthermore, the AMOLED panel lifetime has markedly enhanced by improving IGZO TFT's uniformity and reliability.